Phosphine
hydrogen phosphide, Phosphorated hydrogen, Phosphorus hydride, Phosphorus trihydride
Phosphine
Formula: PH3 | CAS: 7803-51-2
Synonyms: hydrogen phosphide, Phosphorated hydrogen, Phosphorus hydride, Phosphorus trihydride
Phosphine is primarily used in the preparation of semiconductors as an n-type dopant for Si semiconductors, and in preparation of GaP and In P devices. it is used as a fumigant in silos.
Specification
Specification | Value/Information |
---|---|
Formula | PH3 |
CAS no. | 7803-51-2 |
Gas Response Factor, 11.7 eV | 1.4 |
Gas Response Factor, 10.6 eV | 2 |
Gas Response Factor, 10.0 eV | NA |
ppm per mg/m⁻³, (20 °C, 1 bar) | 0.659 |
Molecular Weight, g/mole | 34.0 |
Melting point, °C | -133 |
Boiling point, °C | -87.5 |
Flash point, °C | - |
Lower Explosive Limit, % | 1.79 |
Specification | Value/Information |
---|---|
Density, g.cm⁻³ | 1.492 |
Ionisation Energy, eV | 9.96 |
EH40 STEL, ppm | 0.3 |
EH40 STEL, mg.m⁻³ | 0.42 |
NIOSH ST, ppm | 0.3 |
NIOSH TWA REL, ppm | 0.4 |
NIOSH ST, mg.m⁻³ | 1 |
NIOSH TWA REL, mg.m⁻³ | 1 |
NIOSH IDLH, ppm | 50 |
OSHA TWA PEL, ppm | 0.3 |
OSHA TWA PEL, mg.m⁻³ | 0.4 |